The KAVLI NANOSCIENCE INSTITUTE

Equipment Contact List

AreaEquipment nameLabRunr NameContact PersonBackup PersonMailing List
Lithography Raith EBPG 5000+ EBPG_5000 Guy Matt kni-ebpg
Raith EBPG 5200 EBPG_5200 Guy Matt kni-ebpg
GCA 6300 DSW Stepper Stepper Bert Guy kni-stepper
Suss MA6 Mask Aligners Suss1 and 2 Bert Guy kni-photolith
Heidelberg DWL-66 Laserwriter Maskwriter Guy Alex kni-dwl66
Hoods and optical scopes Bert Guy kni-chemistry
Etch,
Deposition and
Post-Processing
Oxford Bosch DRIE ICP 380 Oxford_DRIE Nathan Bert kni-oxfordicp
Oxford Dielectric ICP 380 Oxford_380 Nathan Bert kni-oxfordicp
Oxford III-V Metal ICP 380 Oxford_III_V Nathan Bert kni-oxfordicp
Oxford PECVD Oxford_PECVD Nathan Bert kni-oxfordpecvd
Plasmatherm Reactive Ion Etch RIE Nathan Alex kni-plasmatherm
XeF2 etcher XeF2 Bert Alex kni-xef2
CHA Mark 40 E-beam evaporator Ebeam_CHA Alex Nathan kni-cha
Lesker Labline E-beam evaporatorEbeam_Lesker Alex Nathan kni-labline
Paratech LabTop 3000 Parylene Coater Parylene Alex Nathan kni-parylene
AJA Chalcogenide UHV Sputter Chalc_sputter Alex Nathan TBD
AJA Dielectric UHV Sputter Diel_sputter Alex Nathan TBD
Nanoscribe PPGT Nanoscribe_PPGT Alex Matt kni-nanoscribe
Temescal FC-1800 E-beam Evaporator Ebeam_TES Alex Nathan kni-tes
Tystar Tytan Tube FurnaceFurnace1 & 2 Nathan Bert kni-tystar
Modular Process Technology RTP-600S RTP Alex Nathan kni-rta
Suss SB6L Wafer Bonder Bonder Alex Nathan kni-sb6l
Microscopy Bruker Dimension ICON AFM AFM Matt Guy kni-afm
FEI Nova 200 Nanolab Dualbeam Nova200 Matt Guy kni-nova200
FEI Nova 600 Nanolab Dualbeam Nova600 Matt Guy kni-nova600
FEI Quanta ESEM Quanta Matt Guy kni-quanta
FEI Sirion FESEM Sirion Matt Guy kni-orion
Zeiss Orion NanoFab He-Ne-Ga FIB Orion Matt Guy kni-tf20
FEI Tecnai F-20 STEM TF20 Matt Guy kni-tf20
FEI Tecnai F-30 STEM TF30 Matt Guy kni-tf30
Chemistry and Metrology Tousimis 915B Critical Point Dryer CPD Bert Alex kni-cpd
Wire Bonder, Profilers, Filmetrics   Bert Guy kni-metrology
Dynatex GST-150 Scriber-Breaker Scriber Bert Alex kni-scriber
Fume hoods and wet chemistry   Bert Guy kni-chemistry
Foundry Equipment   Bert Alex kni-foundry
Lab Phone number (626) 395-1539
Last updated 4/18/17
Questions: Guy DeRose (derose@caltech.edu)